Kristallwachstum und Bewertung von Silizium für VLSI und ULSI, Hardcover von Eran...
Crystal Growth and Evaluation of Silicon for VLSI and ULSI, Hardcover by Eranna, Golla, ISBN 1482232812, ISBN-13 9781482232813, Brand New, Free shipping in the US This technical resource for engineers and researchers in the semiconductor fabrication industry presents guidelines on various techniques for growing single silicon crystals, for silicon wafer preparation for very large scale integration (VLSI) and ultra large scale integration (ULSI), and for the analysis and evaluation of silicon wafers. Th describes approaches for selecting silicon-containing compounds, separation of silicon as metallurgical-grade pure silicon, purification, single-crystal growth, and evaluation of defects. B&w images are included. Annotation ©2015 Ringgold, Inc., Portland, OR ()
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