Wafer Fabrication: Automatic Material Handling System by Jie Zhang (English) Har
154,97 €
By Jie Zhang, Huazhong University of Science and Technology. Jie Zhang, Shanghai Jiaotong University, Shanghai, China. This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems.
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