The Physics and Fabrication of Microstructures and Microdevices: Proceedings of
165,38 €
Submicron Lithography Tools. - Electron Beam Nanolithography. - Resists Patterning. - Self-Aligned Growth of Microstructures. - Laser-Induced Growth of Microstructures. - Structural Characterization of Superlattices by X-Ray Diffraction.
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