Mikrolithographie Grundlagen in Halbleiterbauelementen und Fertigungstechno...
257,44 €
Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology, Hardcover by Nonogaki, Saburo; Ueno, Takumi; Ito, Toshio, ISBN 0824799518, ISBN-13 9780824799519, Brand New, Free P&P in the UK "Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
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