Micro/Nano integrierte Fertigungstechnologie und ihre Anwendungen in
69,31 €
Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Xiao-Sheng Zhang, Q. L. Di, F. Y. Zhu, G. Y. Sun, H. X. Zhang.
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