Handbook of Advanced Plasma Processing Techniques by R.J. Shul (English) Paperba
348,18 €
By R.J. Shul, S.J. Pearton. - 1.1 Introduction. - 1.3 The Role of Ions in Reactive Ion Etching. - 1.4 The Influence of the Reactor Walls and Other Surfaces. - 1.6 Summary. - 2.1 Introduction. - 2.3 Collision Processes.
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