Glow Discharge Processes : Sputtering and Plasma Etching, Hardcover by Chapma...
231,22 €
Glow Discharge Processes : Sputtering and Plasma Etching, Hardcover by Chapman, Brian N., ISBN 047107828X, ISBN-13 9780471078289, Like New Used, Free shipping in the US Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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