Electroceramic-Based MEMS: Fabrication-Technology and Applications by Nava Sette
218,74 €
Electroceramic thin ?. Applications and Devices. - Microactuators Based on Thin Films. - Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films. - Thick-Film Piezoelectric and Magnetostrictive Devices.
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