Dry Etching for VLSI by J.A.G. Baggerman (English) Paperback Book
167,00 €
By J.A.G. Baggerman, S.J.H. Brader, A.J. van Roosmalen. Dry Etching for VLSI. This book has been written as part of a series of scientific books being published by Plenum Press. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field.
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