Development of High Performance Piezoelectric AlScN for Microelectromechanical S
48,67 €
Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m². Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN.
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![Produktbild - Dynamics of Microelectromechanical Systems [Microsystems, 17] Lobontiu, Nicolae](https://i.ebayimg.com/thumbs/images/g/PwgAAOSwfVpYo43E/s-l140.jpg)
